| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measurement device, etc., with which, when measuring the shape of a spherical surface to be measured without touching, it is possible to reduce an error corresponding to the distance of length measurement and perform highly accurate shape measurement.SOLUTION: A shape measurement device comprises: a holder 12 for holding a measurement object 20; a sensor 7 for irradiating a surface 21 to be measured with light and measuring the distance to the surface 21 to be measured without touching; an encoder 5 for rotating the sensor 7 around a center axis R1; slide rails 4 and a bar 6 that are a sensor movement mechanism for moving the sensor 7 along an axis R2 orthogonal to the center axis R1 and capable of moving the sensor 7 between intersecting points with the center axis R1 on both sides; an XYZ stage for moving the holder 12 along an axis Z and moving it in the XY plane; and a control device 14 for calculating the position of the spherical center of the surface 21 to be measured on the basis of the measured value outputted from the sensor 7 and making the position of the spherical center matched with the center of rotation C of the sensor 7.SELECTED DRAWING: Figure 1 |
