| 发明名称 |
VAPOR PHASE GROWTH APPARATUS, STORAGE CONTAINER, AND VAPOR PHASE GROWTH METHOD |
| 摘要 |
A vapor phase growth apparatus according to one embodiment includes a reaction chamber, a storage container storing organic metal, a thermostatic bath storing a liquid with a temperature higher than a room temperature and holding the storage container immersed in the liquid, a carrier gas supply path connected to the storage container and supplying a carrier gas to the storage container, an organic-metal-containing gas transportation path connected to the storage container and the reaction chamber, the organic-metal-containing gas transportation path transporting an organic-metal-containing gas to the reaction chamber, the organic-metal-containing gas including the organic metal generated by bubbling or sublimation with the carrier gas, and a diluent gas transportation path connected to the organic-metal-containing gas transportation path at a position below a liquid level of the liquid in the thermostatic bath and transporting a diluent gas for diluting the organic-metal-containing gas. |
| 申请公布号 |
US2016133457(A1) |
申请公布日期 |
2016.05.12 |
| 申请号 |
US201514930975 |
申请日期 |
2015.11.03 |
| 申请人 |
NuFlare Technology, Inc. |
发明人 |
TAKAHASHI Hideshi;SATO Yuusuke |
| 分类号 |
H01L21/02;C30B25/14;C30B29/40;C30B25/10 |
主分类号 |
H01L21/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A vapor phase growth apparatus comprising:
a reaction chamber; a storage container storing organic metal; a thermostatic bath storing a liquid with a temperature higher than a room temperature and holding the storage container immersed in the liquid; a carrier gas supply path connected to the storage container and supplying a carrier gas to the storage container; an organic-metal-containing gas transportation path connected to the storage container and the reaction chamber, the organic-metal-containing gas transportation path transporting an organic-metal-containing gas to the reaction chamber, the organic-metal-containing gas including the organic metal generated by bubbling or sublimation with the carrier gas; and a diluent gas transportation path connected to the organic-metal-containing gas transportation path at a position below a liquid level of the liquid in the thermostatic bath and transporting a diluent gas for diluting the organic-metal-containing gas. |
| 地址 |
Kanagawa JP |
