MIRCO-ELECTRO-MECHANICAL SYSTEM (MEMS) DEVICE

摘要

The invention provides a MEMS device. The MEMS device includes: a substrate; a proof mass, including at least two slots, each of the slots including an inner space and an opening, the inner space being relatively closer to a center area of the proof mass than the opening; at least two anchors located in the corresponding slots and connected to the substrate; at least two linkages located in the corresponding slots and connected to the corresponding anchors; and a multi-dimensional spring structure for assisting a multi-dimensional movement of the proof mass, the multi-dimensional spring structure surrounding a periphery of the proof mass, and connected to the substrate through the linkages and the anchors. The multi-dimensional spring structure includes first and second springs for assisting an out-of-plane movement and an in-plane movement of the proof mass.

主权项

1. A micro-electro-mechanical system (MEMS) device, comprising:
a substrate; a proof mass, including at least two slots, each of the slots including a first inner space and an opening, wherein the first inner space is relatively closer to a center area of the proof mass than the opening; at least two anchors, respectively located in the corresponding slots and connected to the substrate; at least two linkages, respectively located in the corresponding slots and connected to the corresponding anchors; and a multi-dimensional spring structure for assisting a multi-dimensional movement of the proof mass, the multi-dimensional spring structure surrounding a periphery of the proof mass, and connected to the substrate through the linkages and the anchors, the multi-dimensional spring structure comprising:
a plurality of first springs, connected to the proof mass for assisting an out-of-plane movement of the proof mass; anda plurality of second springs, each of the second springs being directly or indirectly connected between a corresponding one of the linkages and a corresponding one of the first springs, for assisting an in-plane movement of the proof mass.