APPARATUS FOR AND METHOD OF SUPPLYING TARGET MATERIAL
摘要
An EUV light source target material handling system Is disclosed which includes a target material dispenser and a target material repository in which solid target material in the target material repository is converted to target material in liquid form through the use of inductive heating.
申请公布号
WO2016073190(A1)
申请公布日期
2016.05.12
申请号
WO2015US56515
申请日期
2015.10.20
申请人
ASML NETHERLANDS B.V.
发明人
RAJYAGURU, CHIRAG;ALGOTS, JOHN, MARTIN;ISHIKAWA, TETSUYA;BAUMGART, PETER, MICHAEL
