发明名称 SCRIBE SEALS AND METHODS OF MAKING
摘要 A semiconductor die includes a plurality of layers, the plurality of layers having a top surface. A scribe seal is located in the plurality of layers and includes a first metal stack having a first metal layer located proximate the top surface. A trench is located in at least one layer of the plurality of layers. The trench extends from the top surface of the plurality of layers and is located a distance from the first metal stack. An electrical insulating layer is located on the top surface. The electrical insulating layer covers at least a portion of the top surface adjacent the first metal layer and extends a distance from the top surface of the first metal layer.
申请公布号 US2016133580(A1) 申请公布日期 2016.05.12
申请号 US201514854896 申请日期 2015.09.15
申请人 Texas Instruments Incorporated 发明人 Bonifield Thomas D.;West Jeffrey A.;Williams Byron;Guo Honglin
分类号 H01L23/00;H01L23/58 主分类号 H01L23/00
代理机构 代理人
主权项 1. A semiconductor die comprising: a plurality of layers, the plurality of layers having a top surface; a scribe seal located in the plurality of layers, the scribe seal including a first metal stack having a first metal layer located proximate the top surface; a trench located in at least one layer of the plurality of layers, the trench extending from the top surface of the plurality of layers and located a distance from the first metal stack; and an electrical insulating layer located on the top surface, the electrical insulating layer covering at least a portion of the top surface adjacent the first metal layer and extending a distance from the top surface of the first metal layer.
地址 Dallas TX US