METHOD FOR MEASURING TEMPERATURE BY REFRACTION AND CHANGE IN VELOCITY OF WAVES WITH MAGNETIC SUSCEPTIBILITY

摘要

Methods and apparatuses for determining in-situ a temperature of a substrate with a thermal sensor in a vacuum chamber are described herein. In one embodiment a thermal sensor has a transmitter configured to transmit electromagnetic waves, a receiver configured to receive electromagnetic waves, and a controller configured to control the transmitter and receiver, wherein the controller determines a temperature from a difference between the transmitted electromagnetic wave and the received electromagnetic wave.

主权项

1. A thermal sensor, comprising:
a transmitter configured to transmit electromagnetic waves; a receiver configured to receive electromagnetic waves; and a controller configured to control the transmitter and receiver, wherein the controller is operable to determine a temperature from a difference between the transmitted electromagnetic wave and the received electromagnetic wave.