摘要 |
The present disclosure relates to deformable membranes and force-sensing capacitor elements useful, for example, in electronic devices that include, for example touch screen displays or other touch sensors. The deformable membranes, generally, include a first, second and third layers, with a first arrangement of a plurality of first structures interposed between the first and third layers and a second arrangement of a plurality of second structures interposed between the second and third layers. At least a portion, but not all, of the plurality of first structures have first and/or second surfaces that each overlap through the thickness of the deformable membrane with one or more of the first surfaces or with one or more of the second surfaces of the plurality of second structures. Electrodes or one or more electrode pairs are incorporated into the deformable membrane layer(s) to form force-sensing capacitors. The present disclosure also relates to methods of making deformable membranes and force-sensing capacitor elements, and electronic devices, e.g. touch screen displays that include the deformable membranes and force-sensing capacitor elements. |