| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate cover capable of preventing substrate charge and, in addition, suppressing thickness.SOLUTION: A substrate cover 13 includes: a conductive frame body 13a covering a surface edge region and a peripheral surface upper region of a substrate drawn by a charged particle beam, the conductive frame body 13a including a notched part that is provided in a part of an inner circumference of the conductive frame body 13a, and a recess provided at an outer circumferential side of a top face of the conductive frame body so as to be neighboring to the notch part side by side in a frame width direction of the conductive frame body 13a; and a conductive electrode part 13d provided on the recess so as to protrude into the notched part and a frame of the conductive frame body 13a, the electrode part 13d including a contact part conducted with a surface of a substrate and a flange part covering an upper part of a gap between an inner wall of the notched part and the electrode part 13d.SELECTED DRAWING: Figure 2 |
