| 摘要 |
The present publication discloses a capacitive surface micromechanical pressure sensor structure (12) including at least one sensor element (33), each sensor element (33) comprising a substrate (1), a bottom electrode (3) in a mechanical connection with the substrate (1), and at least one top electrode (6) electrically isolated and spaced apart by a first cavity (5) from said bottom electrode (3), the top electrode (6) is deformable under the pressure (10) to be measured. In accordance with the invention the bottom electrode (3) is released (11, 34) from the substrate (1) at least essentially in the vicinity of the cavity (5). |
