| 摘要 |
PROBLEM TO BE SOLVED: To detect breakage of a diaphragm at an early stage.SOLUTION: A differential pressure/pressure transmitter comprises: a diaphragm 101 made of metal in contact with liquid of a measurement object and receiving pressure of the liquid on the front face side thereof; pressure transmission liquid 102 filled in the rear face side of the diaphragm 101; and an ion conduction layer 103 constituted of hydrogel and placed on the rear face of the diaphragm 101 in contact with the whole area thereof. The differential pressure/pressure transmitter further comprises first electrode wiring 105 electrically connected to the diaphragm 101 and second electrode wiring 106 electrically connected to the ion conduction layer 103 while separated from the diaphragm 101.SELECTED DRAWING: Figure 1 |
