SUCTION DEVICE AND METHOD FOR CONTROLLING SUCTION DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a suction device capable of evenly attaching a sheet-like medium onto an upper face of a suction stage without being affected by properties of the sheet-like medium including sizes of wrinkles and warps, and without damaging finished articles including the sheet-like medium and electronic devices integrated on the sheet-like medium.SOLUTION: A suction device 4 comprises: a suction stage 61 attaching a sheet-like medium by sucking onto its top face formed as a flat surface; and a squeegee mechanism 41 installed above the suction stage and causing the sheet-like medium to closely contact the top face of the suction stage by moving over the suction stage.SELECTED DRAWING: Figure 3