METHOD FOR PRODUCING ORGANIC SOLVENT INCLUDING OXIDE OF SILICON HYDRIDE

摘要

[Problem] To provide a method for producing an organic solvent (a coating solution) including an oxide of a silicon hydride, wherein the oxide of the silicon hydride is formed in the coating solution before coating a substrate, and a film of the oxide of the silicon hydride can be formed on the substrate without the need for placement under a non-oxidizing atmosphere during coating, and without the need for heat treatment on the substrate after coating. [Solution] This method for producing an organic solvent including an oxide of a silicon hydride is characterized in that an oxygen-containing gas is blown into an organic solvent including the silicon hydride or a polymer thereof. The silicon hydride is a cyclic silane. The silicon hydride is a cyclopentasilane. The oxide of the silicon hydride or the polymer thereof is included in a proportion which satisfies (remaining Si-H groups)/(Si-H groups before oxidation)=1-40 mol%. The cyclic silane can be obtained by inducing a reaction with a hydrogen halide in cyclohexane in the presence of aluminium halide, dissolving the resultant cyclic silane in an organic solvent, and reducing the resultant solution.