发明名称 |
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF |
摘要 |
(OBJECT) The object is to provide a lightened semiconductor device and a manufacturing method thereof by pasting a layer to be peeled to various base materials.;(MEANS FOR SOLVING THE PROBLEM) In the present invention, a layer to be peeled is formed on a substrate, then a seal substrate provided with an etching stopper film is pasted with a binding material on the layer to be peeled, followed by removing only the seal substrate by etching or polishing. The remaining etching stopper film is functioned as a blocking film. In addition, a magnet sheet may be pasted as a pasting member. |
申请公布号 |
US2016133683(A1) |
申请公布日期 |
2016.05.12 |
申请号 |
US201615000710 |
申请日期 |
2016.01.19 |
申请人 |
Semiconductor Energy Laboratory Co., Ltd. |
发明人 |
Takayama Toru;MARUYAMA Junya;OHNO Yumiko;MURAKAMI Masakazu;HAMATANI Toshiji;KUWABARA Hideaki;YAMAZAKI Shunpei |
分类号 |
H01L27/32;H01L27/12;H01L51/52 |
主分类号 |
H01L27/32 |
代理机构 |
|
代理人 |
|
主权项 |
1. (canceled) |
地址 |
Atsugi-shi JP |