发明名称 WAFER DEFECT DISCOVERY
摘要 Systems and methods for discovering defects on a wafer are provided. One method includes detecting defects on a wafer by applying a threshold to output generated by a detector in a first scan of the wafer and determining values for features of the detected defects. The method also includes automatically ranking the features, identifying feature cut-lines to group the defect into bins, and, for each of the bins, determining one or more parameters that if applied to the values for the features of the defects in each of the bins will result in a predetermined number of the defects in each of the bins. The method also includes applying the one or more determined parameters to the output generated by the detector in a second scan of the wafer to generate a defect population that has a predetermined defect count and is diversified in the values for the features.
申请公布号 WO2016073638(A1) 申请公布日期 2016.05.12
申请号 WO2015US59085 申请日期 2015.11.04
申请人 KLA-TENCOR CORPORATION 发明人 CHEN, HONG;WU, KENONG;PLIHAL, MARTIN;PANDITA, VIDUR;SANAPALA, RAVIKUMAR;BHAGAT, VIVEK;LAKHAWAT, RAHUL;BARIS, OKSEN;RAMACHANDRAN, RAJESH;HAQUE, NOASHIN
分类号 H01L21/66 主分类号 H01L21/66
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