发明名称 |
SEMICONDUCTOR DEVICE AND PRODUCTION METHOD THEREFOR |
摘要 |
Provided are a semiconductor device capable of reducing power consumption and a production method therefor. The semiconductor device comprises: an Si (silicon) substrate; an SiC (silicon carbide) layer formed on the surface of the Si substrate; an AlN (aluminum nitride) layer formed on the surface of the SiC layer; and an n-type GaN (gallium nitride) layer formed on the surface of the AlN layer; a first electrode formed on the surface side of the GaN layer; and a second electrode formed on the rear surface side of the Si substrate 1. The size of a current flowing between the first electrode and the second electrode depends on the voltage between the first electrode and the second electrode. |
申请公布号 |
WO2016072122(A1) |
申请公布日期 |
2016.05.12 |
申请号 |
WO2015JP72863 |
申请日期 |
2015.08.12 |
申请人 |
AIR WATER INC. |
发明人 |
FUKAZAWA, AKIRA;OUCHI, SUMITO |
分类号 |
H01L29/872;H01L21/20;H01L21/205;H01L29/47 |
主分类号 |
H01L29/872 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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