发明名称 SEMICONDUCTOR DEVICE AND PRODUCTION METHOD THEREFOR
摘要 Provided are a semiconductor device capable of reducing power consumption and a production method therefor. The semiconductor device comprises: an Si (silicon) substrate; an SiC (silicon carbide) layer formed on the surface of the Si substrate; an AlN (aluminum nitride) layer formed on the surface of the SiC layer; and an n-type GaN (gallium nitride) layer formed on the surface of the AlN layer; a first electrode formed on the surface side of the GaN layer; and a second electrode formed on the rear surface side of the Si substrate 1. The size of a current flowing between the first electrode and the second electrode depends on the voltage between the first electrode and the second electrode.
申请公布号 WO2016072122(A1) 申请公布日期 2016.05.12
申请号 WO2015JP72863 申请日期 2015.08.12
申请人 AIR WATER INC. 发明人 FUKAZAWA, AKIRA;OUCHI, SUMITO
分类号 H01L29/872;H01L21/20;H01L21/205;H01L29/47 主分类号 H01L29/872
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