| 摘要 |
In a conventional fine particle detection device that vaporizes fine particles attached to the object of examination by heating, processing capability decreases as the processing time elapses due to the influence of deposition of fine particles other than the object of examination, dirt/dust, a residue of the fine particles as the object of examination, or residual matter. A fine particle detection device according to the present invention includes: a vaporization device that vaporizes the fine particles trapped by a trap device by vaporization or decomposition; a first flow passageway in which a mixture of a component vaporized by the vaporization device and another component flows; a second flow passageway branching from the first flow passageway in a direction of inertial force acting on the other component; a third flow passageway branching from the first flow passageway in a direction different from the direction of the inertial force; and an analysis device that analyzes a component introduced into the third flow passageway. |
