发明名称 A WASHING APPARATUS
摘要 A washing apparatus is disclosed. The washing apparatus includes a storage bath which has an internal space whose upper surface is open; a washing supporter which is arranged in the upper part of the storage bath, and supports the circumference of a shower head having hole parts in a seal contact state; a washing solution supply part to supply a washing solution to the internal space of the storage bath; and a washing air supply part which supplies washing air to a washing bath side so that the washing solution stored in the storage bath can be changed into mist by air pressure to pass through the hole parts of the shower head. So, the shower head can be simply washed in a wet washing scheme.
申请公布号 KR20160050719(A) 申请公布日期 2016.05.11
申请号 KR20140149527 申请日期 2014.10.30
申请人 CINOS CO., LTD. 发明人 LEE, MYUNG WOO;KIM, SUN OK;DO, MIN GI
分类号 H01L21/302;H01L21/205 主分类号 H01L21/302
代理机构 代理人
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