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发明名称
ブラックカラムスペーサの形成方法
摘要
申请公布号
JP5916939(B2)
申请公布日期
2016.05.11
申请号
JP20150252114
申请日期
2015.12.24
申请人
東京応化工業株式会社
发明人
植松 照博;舘野 功;高橋 香織;山口 尚人
分类号
G03F7/027;G02F1/1339;G03F7/004;G03F7/033;G03F7/038;G03F7/20
主分类号
G03F7/027
代理机构
代理人
主权项
地址
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