摘要 |
A semiconductor device of the present disclosure includes a semiconductor layer provided on a main surface of a substrate. A cell region is provided with a gate insulating film disposed on the semiconductor layer and a gate electrode disposed on the gate insulating film, and a wiring region is provided with a field insulating film disposed on the semiconductor layer and a gate wire disposed on the field insulating film. An end of the field insulating film has a convex shape in a cross section perpendicular to the main surface of the substrate, and an upper surface of the field insulating film is rougher than an upper surface of a portion of the gate wire below which the field insulating film is not disposed. |