发明名称 半導体装置
摘要 A semiconductor device of the present disclosure includes a semiconductor layer provided on a main surface of a substrate. A cell region is provided with a gate insulating film disposed on the semiconductor layer and a gate electrode disposed on the gate insulating film, and a wiring region is provided with a field insulating film disposed on the semiconductor layer and a gate wire disposed on the field insulating film. An end of the field insulating film has a convex shape in a cross section perpendicular to the main surface of the substrate, and an upper surface of the field insulating film is rougher than an upper surface of a portion of the gate wire below which the field insulating film is not disposed.
申请公布号 JP5914865(B2) 申请公布日期 2016.05.11
申请号 JP20140209717 申请日期 2014.10.14
申请人 パナソニックIPマネジメント株式会社 发明人 工藤 千秋
分类号 H01L29/78;H01L21/316;H01L21/336;H01L29/12 主分类号 H01L29/78
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