| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve strength of a workpiece holding member for holding a workpiece to make the member hard to get damaged. <P>SOLUTION: A resin solution is applied on a base material 1 and wet-solidified to form a foaming layer 2. The base material 1 on the rear of the foaming layer 2 is exfoliated. The foaming layer 2 is sandwiched between smooth members 3, and heat and pressure are applied. Strength is improved by crushing bubbles or the like on front and rear faces 2a-1 and 2b-1 of the foaming layer 2 to make dense. A density distribution of the foaming layer 2 exhibits a gradually inclined distribution as it is smaller at the center than on the front and rear faces in a thickness direction. <P>COPYRIGHT: (C)2011,JPO&INPIT |
