| 摘要 |
[Problem] To provide a wire bonding method and wire bonding device whereby a free air ball with a large ball diameter can be formed stably while suppressing the oxidation of the free air ball. [Solution] In addition to the supply of anti-oxidation gas from a gas supply means (10) into an insertion portion (32), anti-oxidation gas is supplied via a gas supply nozzle (40) disposed outside the insertion portion (32) so as to cover an entry of the insertion portion (32), and a spark discharge is caused with the tip of a wire (74) positioned inside the insertion portion (32) and with the tip of a capillary (3) positioned outside the insertion portion (32), whereby a free air ball (75) having a large ball diameter can be formed stably while oxidation of the free air ball (75) is suppressed. |
