| 摘要 |
PROBLEM TO BE SOLVED: To prevent reduction in durability of a vacuum pump by preventing wear of a rotor and a side plate.SOLUTION: A vacuum pump includes a hollow cylinder chamber S which has an opening at one end of a casing body 22, a rotor 27 which is driven to rotate inside the cylinder chamber S, a side plate 26 which closes the opening of the cylinder chamber S, and a pump cover 24 which is provided opposite the rotor 27 across the side plate 26 and fixed to the casing body 22. The side plate 26 is provided with a communication hole 261 which faces a shaft hole 27A of the rotor 27 and communicates with a space 80 formed between the side plate 26 and the pump cover 24. |
