PLASMA DEPOSITION APPARATUS

摘要

Disclosed is a plasma deposition apparatus capable of depositing a thin film at a low temperature when manufacturing a flexible OLED display. The present invention provides a plasma deposition apparatus which includes a shower head having a plurality of through-holes in an inductive coupled plasma generating device, and thus allows a reaction gas to be uniformly distributed, thereby improving deposition uniformity. Furthermore, by-products created in a chamber can be cleaned even without having a separate remote plasma source.