发明名称 案内装置、露光装置および物品の製造方法
摘要 The present invention provides a guide apparatus including a guide member located on a base, and a moving member movable along the guide member. The guide apparatus comprising a plurality of plate members each including a portion facing the base and extending from the portion in a direction to separate from the base, wherein the plurality of plate members are located apart from each other in a direction to separate from the moving member.
申请公布号 JP5917255(B2) 申请公布日期 2016.05.11
申请号 JP20120093397 申请日期 2012.04.16
申请人 キヤノン株式会社 发明人 諸橋 明;是永 伸茂
分类号 F16C29/08;F16C29/04;F16C33/76;H01L21/027;H01L21/68 主分类号 F16C29/08
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