发明名称 露点温度計測システム
摘要 PROBLEM TO BE SOLVED: To continue dew-point temperature measurement without interruption during not only automatic cleaning control of a mirror surface but also dew-point temperature measurement control, thereby eliminating a need for a manual cleaning of the mirror surface or provision of an additional device for removing a condensate.SOLUTION: A dew-point meter 1 is handled as a measuring dew-point meter for initial operation, and a dew-point meter 2 is handled as an auxiliary dew-point meter for initial operation. The dew-point meters 1 and 2 are put under dew-point temperature measurement control, and dew-point temperatures of the dew-point meters 1 and 2 are respectively defined as valid and invalid. On the dew-point meter 1 whose measurement value is defined as valid, determination of the mirror surface being normal/abnormal is inhibited; while on the dew-point meter 2 whose measurement value is defined as invalid, determination of the mirror surface being normal/abnormal is permitted. In a case where the mirror surface of the dew-point meter 2 is determined to be abnormal, the dew-point meter 2 is put under automatic cleaning control, and, after the automatic cleaning control, the dew-point meter 2 is reverted to dew-point temperature measurement control and defined as valid, followed by putting the dew-point meter 1 under automatic cleaning control. Under the automatic cleaning control, condensate possibly attached to the mirror surface is removed by causing the condensate to evaporate or sublimate.
申请公布号 JP5914188(B2) 申请公布日期 2016.05.11
申请号 JP20120129365 申请日期 2012.06.06
申请人 アズビル株式会社 发明人 金井 良之
分类号 G01N25/68 主分类号 G01N25/68
代理机构 代理人
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