发明名称 被測定物の測定方法
摘要 The present invention provides a measuring method for measuring characteristics of a specimen (2) to be measured by holding the specimen (2) on an aperture array structure (1) having apertures (10), applying an electromagnetic wave to the aperture array structure (1), and detecting frequency characteristics of the electromagnetic wave reflected by the aperture array structure (1), wherein the measuring method includes the steps of attaching a liquid (3) directly or indirectly to at least a part of a first principal surface that is one of principal surfaces of the aperture array structure (1), and applying the electromagnetic wave from side including a second principal surface that is the other principal surface of the aperture array structure (1), the apertures (10) of the aperture array structure (1) have size not allowing the liquid (3) to leak from the first principal surface side to the second principal surface side, and the liquid (3) is attached to the first principal surface of the aperture array structure (1) in a state opened to an atmosphere under air pressure.
申请公布号 JP5914474(B2) 申请公布日期 2016.05.11
申请号 JP20130517918 申请日期 2012.04.09
申请人 株式会社村田製作所 发明人 近藤 孝志;神波 誠治;小川 雄一;冨田 さくら
分类号 G01N21/35;G01N21/01;G01N21/3586 主分类号 G01N21/35
代理机构 代理人
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