マスクブランクの製造方法及び転写用マスクの製造方法,申请号JP20120037038-传众专利搜索

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发明名称	マスクブランクの製造方法及び転写用マスクの製造方法
摘要
申请公布号	JP5914035(B2)	申请公布日期	2016.05.11
申请号	JP20120037038	申请日期	2012.02.23
申请人	ＨＯＹＡ株式会社	发明人	石井勉;石原重徳;瀬藤佑介;鈴木寿幸
分类号	G03F1/54;C23C14/34;G03F1/68	主分类号	G03F1/54
代理机构		代理人
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地址

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