发明名称 発光ダイオード及びその製造方法
摘要 A light-emitting diode and manufacturing method, including a flat portion and a mesa structure. An inclined side surface is formed by wet etching such that a cross-sectional area of the mesa structure is continuously reduced toward a top surface. A protective film covers the flat portion, the inclined side surface, and a peripheral region of the top surface of the mesa structure. The protective film includes an electrical conduction window arranged around a light emission hole and from which a compound semiconductor layer is exposed. A continuous electrode film contacts the exposed compound semiconductor layer, covers the protective film formed on the flat portion, and has the light emission hole on the top surface. A transparent conductive film is formed between a reflecting layer and the layer at a position that corresponds to the electrical conduction window and in a range surrounded by the electrical conduction window.
申请公布号 JP5913955(B2) 申请公布日期 2016.05.11
申请号 JP20110277535 申请日期 2011.12.19
申请人 昭和電工株式会社 发明人 粟飯原 範行
分类号 H01L33/38;H01L33/20 主分类号 H01L33/38
代理机构 代理人
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