| 摘要 |
The present invention provides an interferometer and the like, that is capable of ensuring the speed stability of the movable mirror while achieving the speed up of the reciprocal movement of the moving mirror and suppressing the increment of the maximum instantaneous thrust force required for the turning back as much as possible. The interferometer according to the present invention includes: a moving mirror; a movement mechanism for reciprocating the moving mirror; movement control part for controlling the movement mechanism and allowing the moving mirror to be reciprocated at a constant speed; and a measurement part for measuring a position of the moving mirror. In this configuration, the movement control part is adapted to receive target position data indicating a target position of the moving mirror, and control the movement mechanism so as to bring the measurement position of the moving mirror measured by the measurement part close to the target position indicated by the target position data. And, a time-varying waveform of the target position indicated by the target position data is formed into a trapezoidal wave by horizontally cutting apex portions of the triangular waveform, or is further formed into a smooth wave by rounding away the corner points of the trapezoidal waveform. |
