PREPARATION METHOD OF REUSE ITO TARGET AND THE REUSE ITO TARGET PREPARED THEREBY

摘要

The present invention relates to a method to manufacture a recycled ITO target, and a recycled ITO target manufactured thereof. The method to manufacture the recycled ITO target coats an ITO target having a consumable part with powder containing one or more types of metal using a low-temperature injection process. The method to manufacture the recycled ITO target comprises: a step of obtaining the ITO target; a step of coating a consumable part of a debonded ITO target; and a step of processing a surface of the ITO target where the consumable part is coated.