A device for gas movement in vacuum-coating systems is disclosed that extracts gaseous coating material in the coating chamber that has not been deposited on the substrates to be coated. At least one pump for extracting the coating material is connected to it in an axial extension of the suction device; the suction device has one or more suction openings and is divided up into at least two axial areas whose suction characteristics can be adjusted separately from one another to a great extent.
申请公布号
EP2877610(B1)
申请公布日期
2016.05.11
申请号
EP20130739717
申请日期
2013.07.23
申请人
MEYER BURGER (GERMANY) AG
发明人
MAI, JOACHIM;DECKER, DANIEL;HELBIG, STEFAN;LOEWEL, OLIVER