METHOD FOR DIRECT REUSE GOLD SPUTTERING TARGET OF A SPENT GOLD SPUTTERING TARGET USING COLD SPRAY TECHNIQUE

摘要

The present invention relates to a method for manufacturing a target to be directly reused by using a spent gold (Au) sputtering target through a cold spray scheme. The method includes the steps of: S1) washing or cutting the surface of a spent Au sputtering target; S2) inputting the washed or cut spent Au sputtering target into a coil spray mold; S3) forming a densified coating layer on the spent Au sputtering target inputted into the mold by using raw powder cold spray; and S4) processing the surface of the coating layer. So, the manufacturing time and energy can be reduced.