发明名称 炭化珪素半導体装置の製造方法
摘要 The present invention includes an n+ type substrate, a drift epitaxial layer formed on the n+ type substrate and having a lower concentration of impurity than the n+ type substrate, a Schottky electrode formed on the drift epitaxial layer, and a PI formed as an insulating film by covering at least an end of the Schottky electrode and an end and a side surface of the drift epitaxial layer.
申请公布号 JP5914060(B2) 申请公布日期 2016.05.11
申请号 JP20120052546 申请日期 2012.03.09
申请人 三菱電機株式会社 发明人 松野 吉徳
分类号 H01L29/47;H01L21/28;H01L21/301;H01L29/872 主分类号 H01L29/47
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