SENSOR, SENSOR MODULE, AND DETECTION METHOD

摘要

This sensor has: a first capacitance electrode comprising a plate-shaped conductor or semiconductor; a first terminal electrically connected to the first capacitance electrode; a first insulating film disposed at one surface of the first capacitance electrode; a second capacitance electrode comprising a conductor or semiconductor and disposed in a manner so as to oppose a portion of the first capacitance electrode with the first insulating film therebetween; a second terminal electrically connected to the second capacitance electrode; a variable resistance element disposed on the first insulating film; and a reaction section disposed on the other surface of the first capacitance electrode in a direct manner or with a second insulating film therebetween. The variable resistance element includes: a base body disposed on the first insulating film; a third terminal connected to one end of the base body; and a fourth terminal connected to the other end of the base body.