发明名称 |
A METHOD OF INTRODUCING A STRUCTURE IN A SUBSTRATE |
摘要 |
This invention relates to methods for the production of micro-structured substrates and their application in natural sciences and technology, in particular in semiconductor, microfluidic and analysis devices. It concerns a method of introducing a structure, such as a hole or cavity or channel or well or recess or a structural change by providing a controlled electrical discharge. |
申请公布号 |
EP2376263(B1) |
申请公布日期 |
2016.05.11 |
申请号 |
EP20090799017 |
申请日期 |
2009.12.02 |
申请人 |
PICODRILL SA |
发明人 |
SCHMIDT, CHRISTIAN;DITTMANN, LEANDER;STURA, ENRICO |
分类号 |
B26F1/28 |
主分类号 |
B26F1/28 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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