发明名称 |
REPLACEMENT DEVICE FOR AN OPTICAL ELEMENT |
摘要 |
Replacement devices for at least one replaceable optical element mounted at least indirectly in a lithographic projection exposure apparatus are disclosed. Lithography objectives and illumination systems are also disclosed. Methods for positioning a replaceable optical element within a lithographic projection exposure apparatus of this type, and methods for replacing a replaceable optical element within a lithographic projection exposure apparatus via a replacement device are also disclosed. |
申请公布号 |
EP1922586(B1) |
申请公布日期 |
2016.05.11 |
申请号 |
EP20060776955 |
申请日期 |
2006.08.18 |
申请人 |
CARL ZEISS SMT GMBH |
发明人 |
GELLRICH, BERNHARD;WEBER, ULRICH |
分类号 |
G03F7/20 |
主分类号 |
G03F7/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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