Wavelength sweepable laser source

摘要

Wavelength sweepable laser source is disclosed, wherein the laser source is a semiconductor laser source adapted for generating laser light at a lasing wavelength. The laser source comprises a substrate, a first reflector, and a second reflector. The first and second reflector together defines an optical cavity, and are arranged to support light oscillation in the optical cavity along an optical path in a direction normal to the substrate. The optical cavity comprises a void in the optical path. The second reflector is resiliently suspended by a suspension in a distance from the first reflector and having a rest position, the second reflector and suspension together defining a microelectromechanical MEMS oscillator. The MEMS oscillator has a resonance frequency and is adapted for oscillating the second reflector on either side of the rest position. The laser source further comprises electrical connections adapted for applying an electric field to the MEMS oscillator. Furthermore, a laser source system and a method of use of the laser source are disclosed.

主权项

1. A wavelength sweepable laser source, wherein the laser source is a semiconductor laser source adapted for generating laser light at a lasing wavelength, the laser source comprising:
a substrate; a first reflector; and a second reflector, the first and second reflectors together defining an optical cavity, and being arranged to support light oscillation in the optical cavity along an optical path in a direction normal to the substrate, the optical cavity comprising a void in the optical path, the second reflector being resiliently suspended by a suspension at a distance from the first reflector and having a rest position, the second reflector and suspension together defining a microelectromechanical MEMS oscillator, the MEMS oscillator having a resonance frequency and being adapted for oscillating the second reflector on either side of the rest position, the laser source further comprising:
electrical connections and a voltage source connected to the electrical connections adapted for applying an alternating current modulation voltage or a pulsating direct current modulation voltage to the MEMS oscillator so as to sweep the MEMS oscillator both closer to and further away from the first reflector compared to the rest position of the second reflector, wherein the laser source is packaged so as to keep the MEMS oscillator at least under operation under a vacuum having a pressure of 200 Torr or less, and wherein a mechanical quality factor of the packaged MEMS oscillator is at least 10.