Method of forming individual metallic microstructures

摘要

Methods for the formation of individual, precisely shaped nano- or micro-scale metallic structures, particularly pyramids. With this technique, mass fabrication of high-quality, uniform, and ultra-sharp pyramids, cones and wedges is achieved. The high yield, reproducibility, durability and massively parallel fabrication methods of this disclosure provide structures suitable for reliable optical sensing and detection and for cementing near-field optical imaging and spectroscopy as a routine characterization.

主权项

1. A method of making a plurality of three-dimensional metallic microstructures, the method comprising:
masking a silicon-based substrate with a mask having a plurality of apertures therethrough; etching the masked substrate to form a plurality of shaped cavities within the substrate; depositing a metallic layer over the mask and into the plurality of shaped cavities in contact with the substrate, and thus forming a metallic structure within each of the cavities that is shaped by the shaped cavity; removing the metallic layer from over the mask; removing the mask from the substrate to provide a plurality of individual metallic microstructures.