Apparatus for evaluating quality of crystal, and method and apparatus for manufacturing semiconductor light-emitting device including the apparatus

摘要

An apparatus for evaluating the quality of a crystal includes an optical device that measures a surface reflectance of a wafer in which a V-pit is formed; and a data processing unit that calculates a threading dislocation density by calculating a difference in surface reflectance of the wafer that is measured by the optical device.

主权项

1. A method of manufacturing a semiconductor light-emitting device, the method comprising:
growing a wafer so that a surface feature is formed in one or more layers of the wafer for the semiconductor light-emitting device, the wafer including a first conductive layer, an active layer, and a second conductive layer; measuring a surface reflectance of one or more of the first conductive layer, the active layer, and the second conductive layer of the wafer using an optical device during the growing of the wafer; and evaluating a quality of crystal by calculating a difference of the measured surface reflectance over a time interval and by calculating a threading dislocation density of the wafer.