Multi-microphone system

摘要

A microphone system implements multiple microphones on a single base. To that end, the microphone system has a base, and a plurality of substantially independently movable diaphragms secured to the base. Each of the plurality of diaphragms forms a variable capacitance with the base and thus, each diaphragm effectively forms a generally independent, separate microphone with the base.

主权项

1. An apparatus comprising:
a microphone die having a conductive backplate with a plurality of holes, the microphone die also having an electrical interconnect coupled with the backplate to transmit electric signals, the microphone die supporting a plurality of diaphragms, the backplate being spaced from the plurality of diaphragms to form a corresponding number of variable capacitances with the plurality of diaphragms, each of the diaphragms being substantially independently movably secured to the die, wherein the backplate spans the plurality of diaphragms, each diaphragm being movable relative to the backplate, the backplate forming a separate microphone with each diaphragm; a plurality of springs configured to support each of the diaphragms relative to the die, wherein each one of the plurality of springs extends between a support structure of the die and one of the diaphragms, each diaphragm being spaced from the support structure.