Method of measuring an interaction force

摘要

A system and method of measuring an interaction force is disclosed. One embodiment includes providing a method of measuring an interaction force including providing a microelectromechanical transducer. The transducer includes a body, a probe moveable relative to the body, and a micromachined comb drive. The micromachined comb drive includes a differential capacitive displacement sensor to provide a sensor output signal representative of an interaction force on the probe. The probe is moved relative to a sample surface. An interaction force is determined between the probe and the sample surface using the sensor output, as the probe is moved relative to the sample surface.

主权项

1. A method of measuring an interaction force comprising:
providing a microelectromechanical transducer comprising:
a body;a probe moveable relative to the body; anda micromachined comb drive including a differential capacitive displacement sensor to provide a sensor output signal representative of an interaction force on the probe, the differential capacitive displacement sensor including a plurality of sensing capacitors, each sensing capacitor comprising a plurality of comb capacitors and each configured to provide capacitance levels which, together, are representative of a position of the probe, wherein each of the comb capacitors of the sensing capacitors includes a fixed electrode comb coupled to the body and a moveable electrode comb coupled to the probe, the interaction force defined as an attractive force or an adhesive force; moving the probe relative to a sample surface; and determining the interaction force between the probe and the sample surface using the sensor output, as the probe is moved relative to the sample surface and out of contact with the sample surface.