Profile measuring apparatus

摘要

According to one embodiment, a profile measuring apparatus comprises a profile measuring unit, a position acquiring unit, a profile calculating unit, a deflection detecting unit, and a controlling unit. The profile measuring unit has a projecting unit to project a pattern onto a measured object, and an imaging unit to image the pattern. The position acquiring unit acquires a position of the profile measuring unit. The profile calculating unit calculates a profile of the measured object, based on image information from the imaging unit and position information from the position acquiring unit. The deflection detecting unit detects deflection of the projecting unit. The controlling unit executes active correction for the profile measuring unit and/or passive correction for the profile calculating unit, based on the deflection of the projecting unit detected by the deflection detecting unit.

主权项

1. A profile measuring apparatus comprising:
a probe to project a predetermined pattern onto a part of a measured object, and to image the predetermined pattern projected by the probe to produce two-dimensional image information of the predetermined pattern; a position acquiring unit which acquires a position of the probe; a deflection detecting unit which detects a deflection of the probe and produces at least one deflection amount; and a profile calculating unit which is connected so as to be able to communicate with the probe, the deflection detecting unit and the position acquiring unit, wherein the profile calculating unit corrects the two-dimensional image information on the basis of the at least one deflection amount to produce corrected two-dimensional image information, and wherein the profile calculating unit calculates a three-dimensional profile of the part of the measured object, based on the corrected two-dimensional image information and position information from the position acquiring unit, after the profile calculating unit corrects the two-dimensional image information.