Systems and methods of angle-resolved low coherence interferometry based optical correlation

摘要

Systems and methods of angle-resolved low coherence interferometry based optical correlation are disclosed. According to an aspect, a method includes directing a sample beam towards a sample for producing a scattered sample beam from the sample. The method also includes receiving the scattered sample beam at a multitude of scattering angles in at least two directions. Further, the method includes cross-correlating the scattered sample beam with a reference beam to produce a two-dimensional angle and depth resolved profile of the sample scattered beam. The method also includes processing the two-dimensional angle and depth scattered profile to obtain correlated information about scattering structures in the sample.

主权项

1. A method of angle-resolved low coherence interferometry based optical correlation, the method comprising:
directing a sample beam towards a sample for producing a scattered sample beam from a single fixed point on the sample; receiving the scattered sample beam resolved at a multitude of scattering angles in at least two directions defined by first and second scattering planes, wherein the first scattering plane is defined by an optical axis of incident light and scattered light diverging from the optical axis in a first direction, and wherein the second scattering plane is defined by the optical axis and scattered light diverging from the optical axis in a second direction that is substantially perpendicular to the first direction; cross-correlating the scattered sample beam with a reference beam to produce a depth resolved profile containing information about scattering in the at least two distinct scattering planes of the scattered sample beam; and processing the depth resolved profile to obtain correlated information about scattering structures in the sample.