Method and system for magnification correction from multiple focus planes

摘要

A method for correcting a magnification in image measurements is implemented using a computer device including one or more processors coupled to a user interface and one or more memory devices. The method includes acquiring a plurality of images of a target. Each image is acquired at a different distance from the target. The method also includes determining a distance between a lens used in acquiring the plurality of images and the target and determining a magnification of each acquired image. The method further includes determining a magnification correction with respect to a reference, determining a change in a size of the target, and outputting the determined change in a size of the target.

主权项

1. An inspection imaging system configured to use magnification correction from multiple focus planes, said system comprising:
an imager comprising an image acquisition device and a lens in optical communication with said image acquisition device; a controller comprising:
a user interface;one or more memory devices; andone or more processors communicatively coupled to said user interface and said one or more memory devices, said one or more processors programmed to:
acquire a plurality of images of a target, each image of the plurality of images acquired in a different focus plane of the multiple focus planes with respect to the target using the same optical parameters of the imager for each image;determine a distance between said lens used in acquiring the plurality of images and the target;determine a magnification of each acquired image;determine a magnification correction with respect to a reference target of known dimensions;determine a change in a size of the target; andoutput the determined change in the size of the target to a maintenance planning computer system communicatively coupled to the inspection imaging system.