发明名称 Ink jet recording head substrate, method for manufacturing the same, and ink jet recording head
摘要 An ink jet recording head substrate is provided which includes a base substrate, a heat accumulation layer overlying the base substrate, a heating resistor layer including an electrothermal conversion portion and overlying the heat accumulation layer, a wiring layer electrically connected to the heating resistor layer, and an insulating protective layer covering the heating resistor layer and the wiring layer. The heat accumulation layer includes a porous cyclic siloxane film.
申请公布号 US9333746(B2) 申请公布日期 2016.05.10
申请号 US201514789866 申请日期 2015.07.01
申请人 Canon Kabushiki Kaisha 发明人 Nagamochi Soichiro;Tamatsukuri Shuichi;Takeuchi Souta;Takahashi Kenji;Sakuma Sadayoshi;Komuro Hirokazu;Sakurai Makoto;Ishida Yuzuru;Yasuda Takeru
分类号 B41J2/155;B41J2/14;B41J2/16 主分类号 B41J2/155
代理机构 Canon U.S.A., Inc., IP Division 代理人 Canon U.S.A., Inc., IP Division
主权项 1. An ink jet recording head substrate comprising: a base substrate; a heat accumulation layer overlying the base substrate, the heat accumulation layer including a porous cyclic siloxane film formed by a gas-phase process; a heating resistor layer overlying the heat accumulation layer, the heating resistor layer including an electrothermal conversion portion; a wiring layer electrically connected to the heating resistor layer; and an insulating protective layer covering the heating resistor layer and the wiring layer.
地址 Tokyo JP