发明名称 |
Ink jet recording head substrate, method for manufacturing the same, and ink jet recording head |
摘要 |
An ink jet recording head substrate is provided which includes a base substrate, a heat accumulation layer overlying the base substrate, a heating resistor layer including an electrothermal conversion portion and overlying the heat accumulation layer, a wiring layer electrically connected to the heating resistor layer, and an insulating protective layer covering the heating resistor layer and the wiring layer. The heat accumulation layer includes a porous cyclic siloxane film. |
申请公布号 |
US9333746(B2) |
申请公布日期 |
2016.05.10 |
申请号 |
US201514789866 |
申请日期 |
2015.07.01 |
申请人 |
Canon Kabushiki Kaisha |
发明人 |
Nagamochi Soichiro;Tamatsukuri Shuichi;Takeuchi Souta;Takahashi Kenji;Sakuma Sadayoshi;Komuro Hirokazu;Sakurai Makoto;Ishida Yuzuru;Yasuda Takeru |
分类号 |
B41J2/155;B41J2/14;B41J2/16 |
主分类号 |
B41J2/155 |
代理机构 |
Canon U.S.A., Inc., IP Division |
代理人 |
Canon U.S.A., Inc., IP Division |
主权项 |
1. An ink jet recording head substrate comprising:
a base substrate; a heat accumulation layer overlying the base substrate, the heat accumulation layer including a porous cyclic siloxane film formed by a gas-phase process; a heating resistor layer overlying the heat accumulation layer, the heating resistor layer including an electrothermal conversion portion; a wiring layer electrically connected to the heating resistor layer; and an insulating protective layer covering the heating resistor layer and the wiring layer. |
地址 |
Tokyo JP |