发明名称 Apparatus and method to remove undissolved solids from post process dry film strip solvents
摘要 An apparatus for filtering dry film solvent includes a hollow vessel having a side wall, an open top end and a second end that includes a main outlet that allows fluid to flow out of a hollow interior of the vessel. A removable cover closes off the open top end of the vessel. The apparatus also includes at least one fluid inlet port formed along the side wall of the vessel and defining an entrance into the hollow interior of the vessel and at least one fluid outlet port formed along the side wall of the vessel and defining an exit from the hollow interior of the vessel. A removable filter member is disposed within the hollow interior and is defined by a frame and filter media that extends across the frame such fluid flowing into the hollow interior through the main inlet must flow through the filter media to reach the main outlet. The filter media is disposed at an angle other than 90 degrees relative to the frame of the filter member.
申请公布号 US9333446(B2) 申请公布日期 2016.05.10
申请号 US201313862944 申请日期 2013.04.15
申请人 VEECO PRECISION SURFACE PROCESSING LLC 发明人 Taddei John;Mauer Laura;Clark John;Rapoport Lev
分类号 B01D29/56;B01D29/62;B01D29/64;B01D29/90;B01D29/58;B01D29/05 主分类号 B01D29/56
代理机构 Leason Ellis LLP 代理人 Leason Ellis LLP
主权项 1. An apparatus for filtering dry film solvent comprising: a hollow vessel having a side wall, an open top end and a second end that includes a main outlet that allows fluid to flow out of a hollow interior of the vessel; a removable cover that closes off the open top end of the vessel, the cover including a main inlet to allow fluid to flow into the hollow interior of the vessel; at least one fluid inlet port formed along the side wall of the vessel and defining an entrance into the hollow interior of the vessel; at least one fluid outlet port formed along the side wall of the vessel and defining an exit from the hollow interior of the vessel; and a removable filter member that is disposed within the hollow interior, the removable filter member being defined by a frame and filter media that extends across the frame and is disposed transversely across the hollow interior of the vessel such that fluid flowing into the hollow interior through the main inlet must flow through the filter media to reach the main outlet, wherein the filter media is disposed at an angle other than 90 degrees relative to the frame of the filter member, the removable filter member being disposed within the hollow interior such that the at least one fluid inlet port and the fluid outlet port are disposed above a top surface of the filter media and in registration with one or more openings formed in the frame of the filter member, thereby permitting a cleaning solution to flow through the at least one fluid inlet port into the filter member across the filter media before exiting the filter member and flowing through the at least one outlet port.
地址 Horsham PA US