| 摘要 |
A chemical mechanical polishing fixture having lateral perforation structures includes: a holder and a retaining ring. The holder includes: an annular substrate, a plurality of third holes and a plurality of lateral perforation structures. The annular substrate has a first joint surface, an outer periphery and an inner periphery. The third holes are annularly arranged on the first joint surface, and each third hole includes a first inner thread structure for individually providing a screw to be locked to a semiconductor machine. The lateral perforation structures penetrate from the outer periphery to the inner periphery of the annular substrate, where the lateral perforations are selected from: a converse U-shaped cube structure, an converse U-shaped cube structure, a cuboid structure, a cylinder structure, an elliptic cylinder structure, a flat cuboid structure or a hybrid structure of at least one cuboid structure and the above. |
| 主权项 |
1. A chemical mechanical polishing fixture having lateral perforation structures, comprising:
a holder, comprising:
an annular substrate having a first joint surface, an outer periphery and an inner periphery;a plurality of first holes annularly arranged on the first joint surface, each first hole comprising a first inner thread structure; anda plurality of lateral perforation structures penetrating from the outer periphery to the inner periphery of the annular substrate, wherein the lateral perforations are selected from: a converse U-shaped cube structure, a cuboid structure, a cylinder structure, an elliptic cylinder structure, a flat cuboid structure or a hybrid structure of at least one cuboid structure and the above; a retaining ring having a second joint surface and a plurality of second holes, wherein the second holes are annularly arranged on the second joint surface, and each second hole corresponds to one first hole; and a plurality of bushing screws, each having a screw head, a hollow structure and a screw rod, wherein an inner wall surface of the screw rod has a second inner thread structure, an outer wall surface of the screw rod has an outer thread structure, each bushing screw penetrates the second holes of the retaining ring and the first holes of the holder, and then is locked to the first inner thread structure via the outer thread structure to fix the holder and the retaining ring, so that the first joint surface and the second joint surface are joined closely, and the second inner thread structure is used for locking the chemical mechanical polishing fixture having lateral perforation structures to a semiconductor machine individually with a setscrew. |
