发明名称 Abradable silicone elastomer compound and use thereof
摘要 Addition curing silicone elastomers of high Shore D hardness are grindable and polishable, and are particularly useful as temporary adhesives in the processing of semiconductor wafers.
申请公布号 US9334435(B2) 申请公布日期 2016.05.10
申请号 US201314443325 申请日期 2013.10.22
申请人 WACKER CHEMIE AG 发明人 Koellnberger Andreas
分类号 H01L21/00;C09J183/04;H01L23/00;C08G77/12;C08L83/04;G02B1/04 主分类号 H01L21/00
代理机构 Brooks Kushman P.C. 代理人 Brooks Kushman P.C.
主权项 1. An addition-crosslinkable silicone elastomer composition comprising: (A1) 1-10% by weight of at least one linear organopolysiloxane containing at least 2 SiC-bonded radicals having aliphatic carbon-carbon multiple bonds, wherein the mean molar mass of (A1) is not more than 15,000 g/mol, (A2) 1-20% by weight of at least one linear organopolysiloxane containing at least 2 SiC-bonded radicals having aliphatic carbon-carbon multiple bonds, wherein the mean molar mass of (A2) is at least 40,000 g/mol, (B) 1-40% by weight of at least one organopolysiloxane containing at least three Si-bonded hydrogen atoms per molecule, having a content of Si-bonded hydrogen of from 0.04 to 1.7% by weight and a mean molar mass of not more than 20,000 g/mol, (D) 1-100 ppm (based on the metal) of a hydrosilylation catalyst, (E) 50-99% by weight of at least one branched silicone resin of the general empirical formula (I) (R33SiO1/2)l(R4R32SiO1/2)t(R4R3SiO)u(R32SiO)p(R4SiO3/2)q(R3SiO3/2)r(SiO4/2)s  (I),whereinR3 denotes a linear aliphatic radical,R4 denotes an aliphatically unsaturated radical having a terminal C═C double bond,l, t, u, p, q, r and s denote integers,wherein the following apply:l≧0, t≧0, u≧0, p≧0, q≧0, r≧0 and s≧0; andthe content of aliphatically unsaturated groups in (E) is between 0.2 and 10 mmol/g; and (E) has a mean molar mass of not more than 105 g/mol,with the proviso that the ratio of the Si—H groups provided by component (B) to the aliphatically unsaturated groups provided by components (A1), (A2) and (E) is between 0.5 and 5 and the ratio of the dynamic viscosity of the silicone elastomer composition at shear rates of 1 s−1 and 100 s−1 and a temperature of 20° C. is not more than 1.2 and after crosslinking exhibits a Shore D hardness of at least 25.
地址 Munich DE