THIN-FILM PIEZOELECTRIC MATERIAL ELEMENT, METHOD OF MANUFACTURING THE SAME, HEAD GIMBAL ASSEMBLY, HARD DISK DRIVE, INK JET HEAD, VARIABLE FOCUS LENS AND SENSOR INCLUDING THE THIN-FILM PIEZOELECTRIC MATERIAL ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a method in which warpage and crooked displacement can be suppressed even in a piezoelectric laminated material having a single layer and by which a thin-film piezoelectric material element enhanced in adhesiveness between thin-films can be manufactured without loss of mass production capability and cost decreasing effect.SOLUTION: A thin-film piezoelectric material element 12b includes a laminated structure of a lower electrode film 17, a piezoelectric material film 13 and an upper electrode film 27 which are laminated sequentially. An upper surface of the piezoelectric material film 13 is a concave and convex surface having a convex part and a concave part, the convex part is a curved surface convexly projected while the concave part is a curved surface concavely hollowed, and the upper electrode film 27 is formed on the concave and convex surface. The thin-film piezoelectric material element 12b has a stress balancing film 14 formed with a material having internal stress capable of cancelling element stress, the stress balancing film 14 being formed on the upper electrode film.SELECTED DRAWING: Figure 5