| 摘要 |
Provided are an apparatus and a method for vacuum evaporation. The present invention relates to an apparatus for vacuum evaporation, which can improve uniformity of an evaporated film in a thermal evaporation process. The apparatus for vacuum evaporation comprises: a thermal evaporation module which generates vapor in a vacuum chamber via a circular opening by heating an evaporation material accommodated therein; a moving stage which is disposed in an atmospheric region separated from the vacuum chamber, and controls a position of the thermal evaporation module under the thermal evaporation module; and a sealing unit which is combined with the thermal evaporation module, thereby separating the vacuum chamber and the atmospheric region from each other, surrounds the thermal evaporation module, and maintains the vacuum chamber in a vacuum state while allowing the thermal evaporation module to move. |
